SRC Forum - Message Replies
Forum: Reliability & Maintainability Questions and Answers
Topic: Reliability & Maintainability Questions and Answers
Topic Posted by: Reliability & Maintainability Forum
Organization: System Reliability Center
Date Posted: Mon Aug 31 12:47:36 US/Eastern 1998
Posted by: Floyd Kreuze
Date posted: Wed Aug 25 13:50:25 US/Eastern 1999
Subject: MEMS Reliability Information
Hi to All: What is there in the technical literature on failure rate models and/or failure mode/mechanism distributions for MEMS (microelectromechanical systems) devices?
Subject: MEMS Reliability
Reply Posted by: Bruce Dudley
Organization: Reliability Analysis Center
Date Posted: Mon Sep 13 15:44:27 US/Eastern 1999
After a search of the library at the RAC and the Defense Technical Information Center's DROLS (Defense RDT&E On Line System), we found several papers that should contain failure rate models or failure mode information. These papers are: Performance and Reliability Of New MEMS by S.T.Patton in IEEE 37th Annual International Reliability Physics Symposium, 1999, ESREF 98 - 9th European Symposium on Reliability Of Electron Devices, 1998, Sandia Agile MEMS Prototyping, Report No. SAND--98-0092C, Conf-980810, 1998, MENS Reliability: The Challenge and Promise, SAND--98-0630, Conf-980558, 1998, Failure Modes In Surface Micromachined Microelectromechanical Actuators, SAND--98-0382, Conf-980320, 1998.