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Microelectromechanical Systems (MEMS)

Domestic Price: $75.00
Foreign Price: $85.00
Publication Date: 07/01/2005

Microelectromechanical Systems (MEMS) is a relatively new technology that marries silicon-based microelectronics with micromachining technology, making possible complete systems-on-a-chip. MEMS devices are manufactured using batch fabrication techniques similar to those used for integrated circuits, potentially allowing unprecedented levels of functionality, reliability, and sophistication to be placed on a small silicon chip at a relatively low cost. However, like all new technologies, MEMS has its share of challenges. In particular, the nature of MEMS results in new failure mechanisms and modes not encountered in macro-scale components. This report reviews the MEMS technology, applications and benefits, manufacturing processes, and technical challenges posed by the technology.